By Honeywell Sensing and Productivity Solutions T&M 93
Honeywell Zephyr HAF Series sensors provide a digital or analog interface for reading airflow over the specified full-scale flow span and temperature range. The thermally isolated heater and temperature-sensing elements help these sensors provide a fast response to air or gas flow.
Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are available from ±50 SCCM to ±750 SCCM. The sensors are fully calibrated and temperature compensated with an onboard application specific integrated circuit (ASIC).
The HAF Series is compensated over the temperature range of 0°C to 50°C (32°F to 122°F) and operates across a temperature range of -20°C to 70°C (-4°F to 158°F). The state-of-the-art ASIC-based compensation provides outputs with a response time of 1 ms.
These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge microelectronic and microelectromechanical system (MEMS) with temperature-sensitive resistors deposited with thin films of platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel to provide repeatable response to flow.